Metrology
Metrology
MarSurf UD 130 Combined contour and surface measuring station
EN
MarSurf UD 130
The MarSurf UD 130 closes the gap between the high-end solution MarSurf LD 130 / LD 260 and the new standard combination measuring station MarSurf VD 140 / 280 with two drive units. The technical specification of the MarSurf UD 130 is based on the high-quality interferometric probe system and the fast measuring and positioning speeds that have reduced the measuring times for each workpiece.
  • Technical data

Resolution
2 nm
Start of traversing length (in X)
0.1 mm
End of traversing length (in X)
130 mm
Positioning speed
0.1 mm/s to 30 mm/s
Measuring speed
0.1 mm/s to 5 mm/s;
for roughness measurements
0.1 mm/s to 0.5 mm/s are recommended
Probe
Standard probe LP-D 14-10-2/60°
Measuring range mm

10 mm (100 mm probe arm)
20 mm (200 mm probe arm)

Profile resolution
2 nm
Traversing lengths
0.1 mm to 130 mm
Measuring force (N)
1 mN to 30 mN, software-adjustable