MarSurf CM explorer 3D surface measurement
The flexible, all-round measuring solution
The MarSurf CM explorer is a compact confocal microscope for the three-dimensional measurement and analysis of surfaces – contactless, independent of material, and fast.

The MarSurf CM explorer is suitable for use in test laboratories and equipped for quality assurance in production environments due to its robust construction and insensitivity to environmental influences.

Key benefits:
  • High measuring speed – even at full resolution
  • User-friendly concept
  • Safety through collision detection in all directions to protect your workpiece and measuring system
  • High Dynamic Range (HDR) function, 16-bit
  • Consistent high resolution output of large measuring surfaces due to HD stitching

This established optical measuring system is successfully used, for example, for:
  • Roughness measurement according to DIN EN ISO 4287 / 25178
  • Topography measurement (including volume, wear, isotropy)
  • Measurement of microgeometry and layer thicknesses

Users value the MarSurf CM explorer as a reliable measuring system that provides quantitative traceable 3D characteristics for many industries .
  • Dados técnicos
  • Aplicações
  • Escopo de fornecimento

Velocidade de medição
up to 100fps
up to 2 (nm) vertical
Princípio de medição

High-performance LED (505 nm / white)

Collision detection in xyz direction
Alimentação de tensão
100 - 240 V
ISO 4287, ISO 13565, ISO 25178, …
Positioning volume x
50 mm
Positioning volume y
50 mm
Positioning volume z
70 mm

Mechanical Engineering
To qualify and quantify roughness, geometry and wear volume  

Electronics and semiconductors
Component inspection down to the sub-micrometer range for defect-free products

Medical Technology
Quality assurance of medical surfaces in production and laboratory

Material Science
Optimization of functional properties of new surfaces and products

Microsystems Technology
Measure complex surface geometries of smallest components with nanometer precision

MarSurf CM explorer
  • Confocal measuring head 
    • HDR camera (B/W or color camera)
    • 4x lens revolver with identification
  • L-tripod including control electronics
  • Motorized XY table (50x50 mm) with glass scales for sample positioning and image field merging ("stitching")
  • Motorized Z-axis (70 mm) with glass measuring scale 
  • Measuring system computer with 24" TFT monitor
  • Objective lenses:
    • 5x to 100x selectable
  • MarSurf MSW for intuitive data acquisition
  • MarSurf MfM for professional evaluation, graphical representation and creation of measuring records
    (choice of Standard, Extended or Premium version)