MarSurf CM select 3D surface measurement
Tailor-made measurement of surfaces
The MarSurf CM select is a powerful, configurable confocal microscope for the three-dimensional measurement and analysis of surfaces – contactless, independent of material, and fast.

Axes and isolation systems as well as software modules can be combined individually. This allows the measuring system to be adapted to different measuring tasks.

As a multi-sensor system, the MarSurf CM select also offers the possibility of combining different sensor technologies in one measuring device. Depending on the measuring task, the optimal point sensor can also be flexibly selected.

The MarSurf CM select meets your individual requirements for automation, measuring comfort and accuracy – right up to the fully automated measuring solution.

Key benefits:
  • Designed for continuous operation
  • Automation software with industrial interfaces for transfer to QA systems
  • High measuring speed – even at full resolution
  • Individually configurable to your sample size
  • Multi-sensor system
  • User-friendly concept
  • Safety through collision detection in all directions to protect your workpiece and measuring system
  • High Dynamic Range (HDR) function, 16-bit
  • Consistent high resolution output of large measuring surfaces due to HD stitching

This established optical measuring system is successfully used, for example, for:
  • Roughness measurement according to DIN EN ISO 4287 / 25178
  • Topography measurement (including volume, wear, isotropy)
  • Measurement of microgeometry and layer thicknesses

Users value the reliability of this measuring system, which provides quantitative, traceable 3D characteristics for many industries.
  • Dados técnicos
  • Aplicações
  • Escopo de fornecimento

Velocidade de medição
up to 100fps
up to 2 (nm) vertical
Princípio de medição
High-performance LED (505 nm / white)
Collision detection in xyz direction
Alimentação de tensão
100 - 240 V
ISO 4287, ISO 13565, ISO 25178, …
Positioning volume x
300 mm
Positioning volume y
300 mm
Positioning volume z
100 mm

Mechanical Engineering
To qualify and quantify roughness, geometry and wear volume

Electronics and semiconductors
Component inspection down to the sub-micrometer range for defect-free products

Medical Technology
Quality assurance of medical surfaces in production and laboratory

Material Science
Optimization of functional properties of new surfaces and products

Microsystems Technology
Measure complex surface geometries of smallest components with nanometer precision

MarSurf CM select
  • Confocal measuring head
    • HDR camera (B/W or color camera)
    • 4x lens revolver with identification (optional)
  • Gantry design including control electronics
  • Motorized XYZ axes available in different variants
  • Industrial computer including two 24" TFT monitors
  • Objective lenses:
    • 5x to 100x selectable
  • Vibration damping system available
  • Multi-sensor system (optional)
  • Overview camera (optional)
  • MarSurf MSW for intuitive data acquisition
  • MarSurf ASW for automation (optional)
  • MarSurf MfM for professional evaluation, graphical representation and creation of measuring records
    (choice of Standard, Extended or Premium version)